Equipment Listings - Wafer Fabrication Equipment

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• Chemical Vapor Depositors
  • IEC# 117796 - Applied Materials Model P5000, Cluster PECVD Tool. Wafer size 150mm with two (2) Oxide Chambers. Capable of Silicide Etching, Software revision level of 4.26. Includes total of two (2) Neslabs (one is standard + one additional) and a EMO Guard...
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  • IEC# 117797 - Applied Materials Model 5000CVD, Cluster PECVD Tool. Wafer size 150mm. Three (3) Process Chambers: Oxide: LH DRYVAC 100S; RUVAC 250. Software Revision Level Boss 4.8; Process Gasses TEOS/O2/C3F8; Accessories include: Chiller, LL Pump, TRIVAC...
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• Lithography
  • IEC# 117789 - Semix Tazmo Manual Photoresist Coater, wafer size 100-150mm. Two (2) tracks; Four (4) Cassette Elevators; One (1) Photoresist Coat Station; One (1) Photoresist Dispenser; Three (3) Hot Plates; includes Temperature control cables. Purchased in 1992.
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  • IEC# 117788 - Canon EX-4 Deep UV Wafer Stepper, wafer size 100-200mm. Wafer handler size 100mm – 200mm. Reticle Plate Size 6 in x 6 in.; Site to Site Alignment. Software Revision Level is Canon Main 11.08b. Process track is inline. Environment enclosure is...
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  • IEC# 117787 - Nikon NRS- S2O2A Photolithography Exposure, Deep UV Wafer Stepper, Quantity (1)
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  • IEC# 117790 - Tel Mark 7 'xerogel' designed coater. It has 1 xerogel hotplate that is made to dispense ammonia gas - the ammonia gas is delivered via an ammonium hydroxide/ammonia bubbler. It has one low oxygen plate several standard hotplates and cool plates...
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  • IEC# 117786 - Nikon NSR 2005i8a I-Line Wafer Stepper, wafer size 100mm – 150mm. Plate size 6in x 6inch. Process track is inline capable. Left interface. Environmental enclosure is provided. Reduction magnification: 5:1. Software upgrade for Ethernet...
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• Metal Etchers
  • IEC# 117791 - Applied Material Model 8330, wafer size 125mm – 150mm. Plasma Processing Parallel PI Tool. Sale includes: cables, pump cart, recirculator, (1) RF Generator, (1) Generator, (1) Cryo Pump. Purchased 1993.
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• Other Etchers
  • IEC# 117792 - SEZ Spin Spray Etcher Model RST 100- , backside, 5"-6", set up for 6", This tool includes: (1) acid cabinet, (1) box electrical panel, (3) other crates, 1995 vintage. Quantity (1).
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• Physical Vapor Depositors
  • IEC# 117793 - MRC 603 Vertical Sputterer, the unit has been removed from service and is currently in inside storage. Purchased in 1985. The exterior dimensions are 201cm wide x 140cm deep x 191cm high.
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• Wet Processing
  • IEC# 117784 - FSI Aries Cryokinetic Surface Conditioning System, 1998 vintage, equipment is crated and in storage. Quantity (1).
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  • IEC# 117785 - ECI Technology QLC 5000 Electroplating Bath Analyzer. Automatic Online chemical monitoring system, automatic. 74cm wide x 61cm deep x 188cm tall. Quantity (1)
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