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Machine Listing - Lithography

IEN 117789
Quantity One (1)
Wafer Size 100-150mm
Type Photoresist Coater
Equipment Class Wafer Fabrication
Year (Age) 1992
Model Tazmo SOG
Manufacturer Semix

  Semix Tazmo Manual Photoresist Coater, wafer size 100-150mm. Two (2) tracks; Four (4) Cassette Elevators; One (1) Photoresist Coat Station; One (1) Photoresist Dispenser; Three (3) Hot Plates; includes Temperature control cables. Purchased in 1992.