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Machine Listing - Particle Counters

IEN 117775
Quantity One (1)
Manufacturer Tencor
Type Particle Counters
Wafer Size 2 inch
Equipment Class Wafer Metrology
Model Surfscan 6420

  Tencor Surfscan 6420 (Surfscan 6420) - Excellent Condition - Only used a few times; Currently Facilitized in the fab; Capable of 2" - 8" wafers; Low angle optics; Non-Patterned surface Inspection System; 0.10 micron Defect Sensitivity @ 95% capture; 0.02 ppm Haze Sensitivity; Accuracy within 1%; XY Coordinates