IEC Number
Description
Category
Pharmaceuticals Plant Equipment also available at:
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Machine Listing - Lithography
IEC
117790
Year (Age)
1997
Manufacturer
Tel
Type
Track Zero/Gel
Model
Mark 7
Quantity
One (1)
Equipment Class
Wafer Fabrication
Please Contact Us for More Information
Description:
Tel Mark 7 'xerogel' designed coater. It has 1 xerogel hotplate that is made to dispense ammonia gas - the ammonia gas is delivered via an ammonium hydroxide/ammonia bubbler. It has one low oxygen plate several standard hotplates and cool plates plus a high temperature (350C) hotplate. There are two spin cups, one with 3 pressure dispense and one with 2 pressure + one pump dispense. The pressure dispense is helium driven. This is a standalone SOG system.