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Machine Listing - Particle Counters

IEN 117771
Type Particle Counters
Quantity One (1)
Manufacturer Tencor
Model Surfscan 5500
Equipment Class Wafer Metrology
Wafer Size 100-200mm

  Tencor 5500 Wafer Particle Monitor. "System is in perfect - like new - condition". Measures surface contamination on unpatterned wafers from 100mm to 200mm diameter. Detects particles as small as 0.15 µm in diameter. Identifies particle locations and sizes and displays or prints info as color wafer maps, histograms and data tables. Automated cassette to cassette operation. Haze measurement and seven level haze map.