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Machine Listing - Lithography

IEN 117788
Wafer Size 100-200mm
Equipment Class Wafer Stepper
Model EX-4
Quantity One (1)
Manufacturer Canon
Type Deep UV

  Canon EX-4 Deep UV Wafer Stepper, wafer size 100-200mm. Wafer handler size 100mm – 200mm. Reticle Plate Size 6 in x 6 in.; Site to Site Alignment. Software Revision Level is Canon Main 11.08b. Process track is inline. Environment enclosure is provided. Reduction magnification (5:1); Operating Air Pressure (0.6 to 0.9 MPa); Laser Unit Width (177cm); Depth (150cm); Height (130cm). It is currently located inside the fab.