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Machine Listing - Particle Counters

IEN 117772
Type Particle Counters
Equipment Class Wafer Metrology
Model Surfscan 4500
Wafer Size 50-150mm
Quantity One (1)
Manufacturer Tencor

  Tencor 4500 Wafer Contamination Monitor. Measures surface contamination on unpatterned wafers from 50mm to 150mm diameter. Detects particles as small as 0.2 µm in diameter. Identifies particle locations and sizes and displays or prints info as color wafer maps, histograms and data tables. Automated cassette to cassette operation. Haze measurement and seven level haze map.