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Machine Listing - Lithography
IEN
117786
Model
NSR2005i8a
Quantity
One (1)
Year (Age)
1992
Manufacturer
Nikon
Wafer Size
100-150mm
Type
Wafer Stepper
Equipment Class
Wafer Fabrication
Please Contact Us for More Information
Description:
Nikon NSR 2005i8a I-Line Wafer Stepper, wafer size 100mm – 150mm. Plate size 6in x 6inch. Process track is inline capable. Left interface. Environmental enclosure is provided. Reduction magnification: 5:1. Software upgrade for Ethernet connection to process program distribution system (ppds). Pellicel particle detector. Manufactured in 1992.