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Machine Listing - Lithography

IEN 117790
Year (Age) 1997
Manufacturer Tel
Type Track Zero/Gel
Model Mark 7
Quantity One (1)
Equipment Class Wafer Fabrication

  Tel Mark 7 'xerogel' designed coater. It has 1 xerogel hotplate that is made to dispense ammonia gas - the ammonia gas is delivered via an ammonium hydroxide/ammonia bubbler. It has one low oxygen plate several standard hotplates and cool plates plus a high temperature (350C) hotplate. There are two spin cups, one with 3 pressure dispense and one with 2 pressure + one pump dispense. The pressure dispense is helium driven. This is a standalone SOG system.