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Machine Listing - Particle Counters
IEN
117773
Quantity
One (1)
Manufacturer
Tencor
Type
Particle Counters
Model
Surfscan 7700
Wafer Size
4 - 8 inch
Equipment Class
Wafer Metrology
Please Contact Us for More Information
Description:
Tencor 7700 Patterned Wafer Inspection System. Can detect defects as small as 0.15 µm, while defects below 0.2 µm can be detected on many process levels, including nitride, oxide, polysilicon and TEOS films. Capable of measuring defects on unpatterned wafers and measuring wafers from 4” to 8.” High sensitivity on after-etch and high topography applications. Circular input polarization enhances sensitivity and defect capture on post-CMP and other post-deposited layers.