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Machine Listing - Particle Counters
IEN
117774
Wafer Size
100-200mm
Model
Surfscan 7600
Manufacturer
Tencor
Type
Particle Counters
Equipment Class
Wafer Metrology
Quantity
One (1)
Please Contact Us for More Information
Description:
Tencor 7600 delivers critical defect data quickly. A multi-thresholding capability allows a virtually unlimited number of data collection thresholds to be established for different regions of the device. Substrate sizes: 100, 125, 150, 200 mm diameter wafers. Sensitivity: 0.15 um.