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Machine Listing - Particle Counters

IEN 117774
Wafer Size 100-200mm
Model Surfscan 7600
Manufacturer Tencor
Type Particle Counters
Equipment Class Wafer Metrology
Quantity One (1)

  Tencor 7600 delivers critical defect data quickly. A multi-thresholding capability allows a virtually unlimited number of data collection thresholds to be established for different regions of the device. Substrate sizes: 100, 125, 150, 200 mm diameter wafers. Sensitivity: 0.15 um.