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Machine Listing - Particle Counters
IEN
117772
Type
Particle Counters
Equipment Class
Wafer Metrology
Model
Surfscan 4500
Wafer Size
50-150mm
Quantity
One (1)
Manufacturer
Tencor
Please Contact Us for More Information
Description:
Tencor 4500 Wafer Contamination Monitor. Measures surface contamination on unpatterned wafers from 50mm to 150mm diameter. Detects particles as small as 0.2 µm in diameter. Identifies particle locations and sizes and displays or prints info as color wafer maps, histograms and data tables. Automated cassette to cassette operation. Haze measurement and seven level haze map.