Tencor 4500 Wafer Contamination Monitor. Measures surface contamination

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Testing Equipment
Wafer Fabrication Equipment
Wafer Metrology Equipment

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Machine Listing - Particle Counters

IEN	117772
Type	Particle Counters
Equipment Class	Wafer Metrology
Model	Surfscan 4500
Wafer Size	50-150mm
Quantity	One (1)
Manufacturer	Tencor

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Description: Tencor 4500 Wafer Contamination Monitor. Measures surface contamination on unpatterned wafers from 50mm to 150mm diameter. Detects particles as small as 0.2 µm in diameter. Identifies particle locations and sizes and displays or prints info as color wafer maps, histograms and data tables. Automated cassette to cassette operation. Haze measurement and seven level haze map.